MEMS Resources

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MEMs Books

MEMs Manufactures & Services

A Critical Review of MEMS Gyroscopes Technology and Commercialization Status

Abstract by Steven Nasiri.

All About MEMS

a community-oriented website devoted to the full range of information available about MicroElectoMechanical Systems.

An Overview on MEMS-Based Storage, Its Research Issues and Open Problems

Free download from silicon.com.

A Product Engineering Framework for MEMS IP Development

White paper from ZDNet.

Beyond Corporate Walls: Symbol Mesh Networks

White paper from ZDNet.

Caltech Micromachining Laboratory
Pasadena, CA

The Micromachining Laboratory's research interests include MEMS technology, microsensors, microactuators, microstructure, MEMS systems, and MEMS science.

Crableg Resonator Tutorial

This tutorial provides an overview of the series of steps from the design of a crableg resonator through the testing of the same bonded die.

Current Trends in Optical MEMS

Tutorial by Ming C. Wu, University of California, Berkeley.

DMD Reliability: A MEMS Success Story

Abstract by Michael R. Douglass, Texas Instruments.

Fabless MEMS

On demand webcast from Small Times.

Georgia Tech MEMS Home Page

Describes some of the activities of the Microsensor and Microactuator Group at Georgia Tech.

MEMS and Nanotechnology Clearinghouse

MEMS and Nanotechnology applications, definition, fabrication, challenges, processes, discussion groups.

MEMS Fabrications for Wireless Communications Using Copper Interconnect Technology

White paper from ZDNet.

MEMS Industry Group (MIG)
412.390.1MIG (1644) / Pittsburgh, PA

the unifying voice of the commercial MEMS community, representing those companies with the goal of making money in the MEMS market. By providing forums for information exchange and collaboration we create the horizontal band across the broad range of companies supporting and utilizing MEMS technology.

MEMS Special Packaging Needs

Tutorial by Ken Gilleo, ET-Trends LLC.

MEMS Tutorial

Definition, how it works, applications, from the WAVE Report.

National Institute of Standards & Technology
Mission: To stimulate economic growth through technology, measurements, and standards.

Noise in Microelectromechanical Systems

A tutorial by Ville Kaajakari.

Opto-Micro-Electro-Mechanical Systems (OMEMS)

Tutorial by J.S. Harris, Stanford University.

QuickStudy: MicroElectroMechanical Systems (MEMS)

Article from ComputerWorld.

Science of the Small

Miniature MEMS and nanotechnology devices solve challenges in defense, security, and aerospace applications. Article by Courtney E. Howard.

The Scaling of Micromechanical Devices

This material is adapted from the article “Microrobots and Micromechanical Systems” by W. S. N. Trimmer.

Tutorial on Micro Electro Mechanical Systems (MEMS)

By Bruce Kim Department of Electrical Engineering, Arizona State University.

Tutorial on Micromechanics and MEMS

Tutorial information relating to Micromechanics & MEMS.

Wikipedia

Microelectromechanical systems (MEMS) definition, information, and links.