MKS / ASTEX 2530 3KW /A X2600 PLASMA SUBSYSTEM SOURCE - RF Cafe Forums

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carcher

Post subject: MKS / ASTEX 2530 3KW /A X2600 PLASMA SUBSYSTEM SOURCE

Posted: Sat Aug 14, 2010 1:23 am

Captain

Joined: Thu Mar 04, 2010 12:29 am
Posts: 5

MKS; ASTeX SmartPower (R) System AX2530 with associated AX2600 microwave plasma subsystem.

Microwave Power Generator - 3.0 k WATTS
Model: F120160-3
Serial Numbers: BETA 1-F47 and BETA 1-48
Microwave Head Assembly: F180112-1 S/N 0101
Head assembly is a full device consisting of the following (see below).
Qty: 2 each.

MKS; Microwave Plasma Subsystem AX 2600
All tested cosmetic and perfect condition.

COMPLETE MICROWAVE PLASMA SUBSYSTEM -
MAIN UNIT F120162
MKS; Magnetron power head ASSEMBLY P/N F180112-1 (S/N101)
Subsystem Assembly consisting of the following components:

(a) PS-6/
(b) AX7610NVL-Q-KF50/
(c) F109857(S/N 101)
(d) /F120634 SMART MATCHING NETWORK
(e) F120162-3 MAGNETRON HEAD ASSEMBLY.
(f) PRESSURE TRANSDUCER etc.

All power cables used for Etching Equipment boxed.
Qty: 2 each.

For additional information, please visit my website or feel free to contact me
at: http://www.sinclairtech.com
Vintage 2002

Posted 11/12/2012

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